LAM 853-049542-173 | 24-Channel Temperature Control Node Board
Key Technical Specifications Channel Count: 24 independent temperature control channels Board Type: Node Board, Control Type 3 Alternate P/N: 810-028295-173 Manufacturer: Lam Research Application Domain: Semiconductor Wafer Processing Equipment Material Base: High-performance industrial PCB Form Factor: Compact rack-mountable node board Signal Interface: High-frequency digital/analog sensor inputs System Role: Thermal management and process regulation Operating Environment:…










